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LED Epitaxy Susceptor
Susceptor Semixlab SiC Coated Graphite Susceptor jẹ paati iṣẹda-pipe ti a ṣe apẹrẹ fun epitaxy LED ilọsiwaju ati awọn eto MOCVD. Ti a ṣe pẹlu sobusitireti isostatic graphite iwuwo giga ati aabo nipasẹ ibora CVD ohun alumọni ohun alumọni (SiC) mimọ-giga, susceptor yii n pese pẹpẹ igbona iduroṣinṣin fun alapapo wafer aṣọ ati mimọ iyẹwu igba pipẹ labẹ awọn ipo sisẹ to gaju ju 1100 ° C. Olutayo kọọkan n gba ẹrọ kongẹ ati iṣakoso iṣọkan aṣọ bo lati ṣaṣeyọri aibikita dada didan ni isalẹ Ra 0.2 μm, idinku alemora patiku ati rudurudu gaasi inu riakito MOCVD. Apẹrẹ yii ṣe imudara iṣọkan Layer epitaxial, fa igbesi aye paati ati dinku igbohunsafẹfẹ itọju. A n reti siwaju si ibeere rẹ.
Apejuwe
Semixlab SiC Coated Graphite Susceptor fun LED Epitaxy ṣe ẹya ipilẹ graphite iwuwo giga-giga fun iduroṣinṣin gbigbona ati ibora CVD SiC ipon (Ra ≤0.2 μm) fun idena ipata. Ẹya yii ṣe idaniloju gbigbe ooru aṣọ, ailagbara kemikali, ati igbẹkẹle igba pipẹ ni epitaxy LED MOCVD.
Laarin ilana epitaxy LED, susceptor graphite ti a bo SiC kii ṣe iṣẹ bi dimu wafer ẹrọ lasan, ṣugbọn bi igbona mojuto ati ipin iṣakoso kemikali ti eto MOCVD. O jẹ iduro fun titumọ agbara gbigbona titẹ sii lati RF tabi module alapapo resistive sinu aaye iwọn otutu ti o pin ni deede ati iduroṣinṣin kọja awọn ipo wafer lọpọlọpọ. Iṣeduro igbona giga ti susceptor ati profaili itujade iṣapeye rii daju pe wafer-to-wafer ni ibamu ati isomọ iwọn otutu intra-wafer — ipo pataki fun iyọrisi iṣakoso to muna lori sisanra fiimu GaN ati AlGaInP, ifọkansi dopant, ati didara gara.
Ni akoko kanna, ibora SiC n pese idena kemika ti o lagbara ti o daabobo graphite ti o wa labẹ idinku lati idinku hydrogen, ipata amonia, ati awọn aati iṣaju irin-Organic. Idabobo yii kii ṣe faagun igbesi aye iṣẹ ti alafokan nikan ṣugbọn o tun ṣe idiwọ itusilẹ ti eya erogba ti o le ṣe ibajẹ awọn fẹlẹfẹlẹ epitaxial ti ndagba tabi dinku ṣiṣe itanna ni awọn eerun LED ti pari. Abajade jẹ agbegbe ifaseyin mimọ, idinku igbohunsafẹfẹ itọju, ati ilọsiwaju iduroṣinṣin ilana igba pipẹ.
Jubẹlọ, awọn susceptor ká dada konge ati jiometirika uniformity mu kan decisive ipa ni mimu dédé gaasi sisan ati precursor pinpin laarin awọn MOCVD iyẹwu. Paapaa awọn iyapa arekereke ninu eto tabi sojurigindin ti a bo le ja si awọn iyatọ Layer ala ati sisanra fiimu agbegbe ti kii ṣe awọn aṣọ-ikede. Nipa gbigbe epo ohun-ini ti Semixlab ati awọn imọ-ẹrọ ipari dada, alailagbara kọọkan ṣaṣeyọri flatness ati afọwọṣe, aridaju awọn agbara gaasi aṣọ, awọn kainetics ifaseyin ti o dara julọ, ati awọn abuda fiimu epitaxial ti o tun ṣe.
Ni pataki, Semixlab SiC Coated Graphite Susceptor ṣiṣẹ bi mejeeji amuduro igbona ati apata idoti kan, ni ipa taara ikore LED ati didara ohun elo. Apẹrẹ igbekalẹ ilọsiwaju rẹ ati imọ-ẹrọ ti a bo fi agbara fun awọn aṣelọpọ semikondokito lati ṣaṣeyọri iṣelọpọ giga, imudara ilana imudara, ati iye owo lapapọ lapapọ ti nini ni awọn laini iṣelọpọ MOCVD ode oni.
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