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Semikondokito Quartz Flow Baffle
Semixlab Semikondokito Quartz Flow Baffle jẹ paati iṣẹda-pipe ti a ṣe apẹrẹ lati ṣe ilana ati isokan ṣiṣan gaasi inu CVD, LPCVD, PECVD, itankale, ati awọn ileru ifoyina. Ti a ṣelọpọ lati quartz ultra-high-purity fused quartz (SiO₂, ≥99.99%), o ṣe idaniloju iwọn otutu iduroṣinṣin ati pinpin gaasi lakoko sisẹ wafer, dinku imunadoko fiimu ti kii ṣe isokan, idoti patiku, ati ifisilẹ agbegbe. Iṣalaye opiti giga rẹ, resistance igbona alailẹgbẹ, ati iseda ti ko ni idoti jẹ ki o jẹ paati pataki ni semikondokito ilọsiwaju ati ohun elo apọju SiC/GaN.
Apejuwe
Ⅰ. Ohun elo ati ki o dada Abuda
● Ohun elo: Siliki ti o ni idapọ ti o ga julọ (synthetic tabi quartz adayeba, mimọ ≥99.99%).
● Atako Gbona: Iduroṣinṣin iṣẹ ni awọn iwọn otutu ti nlọsiwaju titi de 1200 ° C.
● Ipari Ilẹ: Awọn ipele didan ti o ni didan pupọ lati ṣe idiwọ ifaramọ patiku.
● Imugboroosi Gbona: Alasọdipalẹ kekere ti imugboroja (5.5 × 10⁻⁷ / ° C) ṣe idaniloju iduroṣinṣin iwọn.
● Kemikali Resistance: Inert si awọn gaasi ipata gẹgẹbi HCl, NH₃, ati SiH₄.
Baffle ṣiṣan kọọkan n gba ayewo ti o muna fun didara dada, deede iwọn, ati iṣakoso nkuta inu, ni idaniloju mimọ ati igbẹkẹle deede ni gbogbo ipele iṣelọpọ.
Ⅱ. Awọn iṣẹ bọtini ni Awọn ilana Semikondokito
Quartz Flow Baffle n ṣiṣẹ bi iṣakoso ṣiṣan mojuto ati paati ilana ilana igbona inu awọn iyẹwu iṣelọpọ iwọn otutu giga. Iṣẹ rẹ lọ jina ju didari awọn gaasi nirọrun — o ṣe ipa multifunctional ni imuduro agbegbe ilana, imudara lilo ohun elo, ati idaniloju isokan wafer-to-wafer.
1. Aṣọ Gas sisan Distribution
Ninu awọn ilana bii LPCVD, PECVD, ati epitaxy, ifijiṣẹ gaasi aṣọ jẹ pataki si iyọrisi idagbasoke fiimu tinrin deede ati pinpin dopant. Jiometirika ti nṣàn quartz baffle ti iṣọra ti iṣelọpọ - pẹlu awọn ikanni ṣiṣan igun rẹ, yiyipada ìsépo, ati aye iṣapeye - ṣe idaniloju pe awọn gaasi ti n ṣiṣẹ ni a pin boṣeyẹ kọja oju wafer. Nipa mimu ilana ṣiṣan laminar kan, baffle ṣiṣan n ṣe idaniloju pe wafer kọọkan laarin ipele kan ni iriri awọn ipo ifihan gaasi kanna, nitorinaa imudara iduroṣinṣin ikore ati aitasera ẹrọ.
2. Imuduro aaye Gbona ati Iwontunws.funfun Gbigbe
Lakoko awọn ilana iwọn otutu ti o ga bi ifoyina igbona tabi Si epitaxial idagbasoke, paapaa awọn iyatọ kekere ni pinpin iwọn otutu le ja si awọn abawọn gara, dislocations, tabi aapọn fiimu.
Ṣiṣan quartz baffle ṣiṣẹ bi olutọsọna igbona:
● Din awọn iwọn otutu iwọn otutu laarin aarin ati eti ọkọ wafer
● Din iwọntunwọnsi igbona didan silẹ laarin ileru
● Din awọn ijaya igbona kuro lakoko iwọn otutu rampu ati awọn iyipo-isalẹ
3. Kontaminesonu Bomole ati Ilana ti nw
Ni iṣelọpọ semikondokito, iṣakoso idoti jẹ pataki julọ. Idoti ti irin tabi patikulu le bajẹ ikore ẹrọ pupọ. Quartz Flow Baffle, ti a ṣe lati ultra-high-purity synthetic fused silica (SiO₂ ≥ 99.99%), ṣafihan ko si awọn ions onirin tabi awọn iṣẹku erogba sinu iyẹwu ilana. Awọn oniwe-dan, ti kii-la kọja dada idilọwọ awọn ikojọpọ ti lenu byproducts ati patiku shedding. Eyi ṣe idaniloju iduroṣinṣin-ite mimọ fun awọn ilana to ṣe pataki gẹgẹbi idasile oxide ẹnu-bode, doping tan kaakiri, ati ifisilẹ dielectric CVD.
Semixlab Quartz Flow Baffle kii ṣe paati palolo nikan 一 o jẹ oluṣe pataki ti iduroṣinṣin ilana, isokan gaasi, ati iṣapeye ikore. Nipasẹ apẹrẹ iṣiṣan ṣiṣan ilọsiwaju rẹ, iwọntunwọnsi gbona, ati akopọ ohun elo mimọ, o ni idaniloju pe wafer kọọkan gba agbegbe ilana iṣakoso ni deede-pataki fun iṣelọpọ ẹrọ semikondokito iran atẹle.
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